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Title: A differential mechanical profilometer for thickness measurement
Authors: Alves, J. Maia
Brito, M. C.
Serra, J. M.
Vallêra, A. M.
Keywords: Differential profilometer
Thickness measurement
Issue Date: 2004
Publisher: American Institute of Physics
Abstract: A low cost differential profilometer based on standard commercial displacement transducers is fully described. Unlike most common profilometers this device can be used to measure the thickness profile of samples having both surfaces irregular. A sensitivity of about 0.2 mm, independent of the sample thickness is achieved.
Appears in Collections:FC-DF - Artigos em Revistas Internacionais

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