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|Title: ||A differential mechanical profilometer for thickness measurement|
|Authors: ||Alves, J. Maia|
Brito, M. C.
Serra, J. M.
Vallêra, A. M.
|Keywords: ||Differential profilometer|
|Issue Date: ||2004|
|Publisher: ||American Institute of Physics|
|Abstract: ||A low cost differential profilometer based on standard commercial displacement transducers is fully described. Unlike most common profilometers this device can be used to measure the thickness profile of samples having both surfaces irregular. A sensitivity of about 0.2 mm, independent of the sample thickness is achieved.|
|Appears in Collections:||FC-DF - Artigos em Revistas Internacionais|
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